Vacuum Pressure Sensor for Semiconductor Applications
FA1M1A
대표이미지
Specifications
Pressure range
0.1 Torr / 1 Torr / 10 Torr / 1,000 Torr
Proof pressure
3,375 Torr
Burst pressure
6,750 Torr
Accuracy
±0.25% of reading (0.5% for the range below 1 Torr)
Operating temperature
0°C ~ 100°C
Supply voltage
15 Vdc ± 5%
Supply current
600 mA (max.)
Sensor output
Analog 0 ~ 10 Vdc
Fitting Type
NW / Bare Tube / VCR / Flange Type
Description
Vacuum pressure sensor for semiconductor equipment is a pressure sensor developed for semiconductor manufacturing processes, analytical instruments, and industrial vacuum systems. It delivers stable, highly repeatable measurement performance from ultra-high vacuum (from 0.1 Torr) through a wide vacuum range up to 1,000 Torr. It can be applied broadly across diverse semiconductor processes and advanced industrial equipment.
Features
- Analog (voltage) output
- Measuring range: 0.1 / 1 / 10 / 1,000 Torr
- Accuracy: ±0.25% of reading (0.5% for the range below 1 Torr)
Application
Semiconductor manufacturing processes, analytical instruments, industrial vacuum systems, medical equipment, and related applications.
Use case 1
